JPS63170465U - - Google Patents
Info
- Publication number
- JPS63170465U JPS63170465U JP6168987U JP6168987U JPS63170465U JP S63170465 U JPS63170465 U JP S63170465U JP 6168987 U JP6168987 U JP 6168987U JP 6168987 U JP6168987 U JP 6168987U JP S63170465 U JPS63170465 U JP S63170465U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- reaction tube
- center
- internal reaction
- installed vertically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168987U JPH0441174Y2 (en]) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168987U JPH0441174Y2 (en]) | 1987-04-22 | 1987-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170465U true JPS63170465U (en]) | 1988-11-07 |
| JPH0441174Y2 JPH0441174Y2 (en]) | 1992-09-28 |
Family
ID=30895263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6168987U Expired JPH0441174Y2 (en]) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441174Y2 (en]) |
-
1987
- 1987-04-22 JP JP6168987U patent/JPH0441174Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441174Y2 (en]) | 1992-09-28 |